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I hope China sent a spy with a photographic memory to tour a chip foundry like in the early 1800’s when America sent Francis Cabot Lowell to Great Britain to memorize the design of the power loom. A British ship even detained him and searched his luggage for loom plans but the plans were stored safely in his mighty noggin. https://www.history.com/news/industrial-revolution-spies-europe
That would be an interesting exercise in espionage but I don't think this would be feasible for modern chip making.
https://spectrum.ieee.org/high-na-euv
This has some interesting tidbits about what the next gen will be. And why even some detailed knowledge of the system is not the same as building it. Even if you got Zeiss's drawings of the anamorphic lens, could they just replicate it? Probably not immediately.